SPECS INA-X

Name (abbreviation) of the procedure: Secondary neutral mass spectrometry (SNMS)

Generic term of the process: MS

Physical Principle: Ion sputtering and detection of neutral particles after ionisation via laser or plasma via quadrupole mass spectrometry.

Scope: Sputtering and characterisaton of layered structures of metallic alloys, compounds (oxides, sulfides etc.) and semiconductors.

Institute: INW

Name: Thomas Peter

Phone: +49 5323 72-2079

Type: Mass spectrometer

Physical force/principle: Mass spectrometry

General scope of application: 3d, Spatial, Metals, Oxidic, Surfaces, (Soft matter)

Available at: TU Clausthal

Website: Sekundärneutralteilchen Massenspektrometer (SNMS)

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SPECS INA-X

SNMS

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