Cameca SX5

EPMA

Name (abbreviation) of the procedure: Electron Probe Microanalysis (EPMA)

Generic term of the process: EPMA

Physical Principle: An Instrument that mainly uses an focused electron beam to generate characteristic X-Ray radiation for chemical analysis

Scope: Spatial resolution method. Uses WDXRF, EDXRF, BSE and SE to analyse morphology, topology and chemical composition of small sample spots

Media: dokumente.ub.tu-clausthal

WDXRF

Name (abbreviation) of the procedure: Wave length dispersive X-Ray fluorescence (WDXRF)

Generic term of the procedure: XRF

Physical Principle: Excitation of inner electron shells to generate characteristic X-Ray radiation

Scope: Spatial resolution method. Uses X-Ray fluorescence (wavelength, (WDXRF) and energy dispersive, (EDXRF)) excited via a focused electron beam to analyze main and minor compounds, typically starting from Na. Lighter elements (except for H, He) are possible but the detection limit is comparable high (X000 µg/g). Li can only be measured with special spectrometers

EDXRF

Name (abbreviation) of the procedure: Energy dispersive X-ray Fluorescence (EDXRF)

Generic term of the procedure: XRF

Physical principle: Excitation of inner electron shells to generate characteristic X-Ray radiation

Scope: Spatial resolution method. Uses X-Ray fluorescence (wavelength, (WDXRF) and energy dispersive, (EDXRF)) excited via a focused electron beam to analyze main and minor compounds, typically starting from Na. Lighter elements (except for H, He) are possible but the detection limit is comparable high (X000 µg/g). Li can only be measured with special spectrometers

SEM

Name (abbreviation) of the procedure: Scanning electron microscopy (SEM)

Generic term of the procedure: Electron spectroscopy

Physical principle: Generation of electrons which are scattered from the sample material (BSE, primary electrons) and electrons which are removed from the material (SE, secondary electrons)

Scope: Spatial resolution method. Uses electrons backscattered (BSE) or secondary (SE)  via a focused electron beam for electron micrographs of sample areas. The BSE can have Z-Contrast showing the average order number of the sample compounds or topological contrast. ESMA-System are not tailored to SEM. Therfore the resolution is inferior (down to 0.1 - 0.5 µm)